JPH0472621U - - Google Patents
Info
- Publication number
- JPH0472621U JPH0472621U JP11574590U JP11574590U JPH0472621U JP H0472621 U JPH0472621 U JP H0472621U JP 11574590 U JP11574590 U JP 11574590U JP 11574590 U JP11574590 U JP 11574590U JP H0472621 U JPH0472621 U JP H0472621U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- reactor
- gas
- vertical diffusion
- diffusion device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims 4
- 239000012535 impurity Substances 0.000 claims 4
- 235000012431 wafers Nutrition 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11574590U JPH0472621U (en]) | 1990-11-02 | 1990-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11574590U JPH0472621U (en]) | 1990-11-02 | 1990-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0472621U true JPH0472621U (en]) | 1992-06-26 |
Family
ID=31863536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11574590U Pending JPH0472621U (en]) | 1990-11-02 | 1990-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0472621U (en]) |
-
1990
- 1990-11-02 JP JP11574590U patent/JPH0472621U/ja active Pending